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 Home > 제품소개 > Outline Diagrams |
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| Diameter |
50.8 ± 0.15㎜ |
| Orientation |
C - plane(0001) ± 0.1°
0.2° off angle of C-axis [0001] ± 0.1° |
| Flat length |
16 ± 0.5㎜ |
| Thickness |
430 ± 15㎛ |
| Surface Quality |
Front Cleanness:Epi-Ready
Front Roughness:0.1nm(Rms)
Rear Roughness:Uniform & Non-Scratch |
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| Diameter |
100 ± 0.25㎜(Basically 4”φ) |
| Orientation |
C - plane(0001) ± 0.1°
0.2° off angle of C-axis [0001] ± 0.1° |
| Flat length |
31 ± 1.0㎜ |
| Thickness |
650 ± 30㎛ |
| Surface Quality |
Front Cleanness: Epi-Ready
Rear Roughness: Uniform & Non-Scratch |
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