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 Home > 제품소개 > Inspection Criteria |
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| Item |
Criteria
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| Shaped pattern not allowed |
Flat top: Flat size >1.0㎛ |
| Pattern height and diameter |
Number of examine point: 5 points(one wafer) |
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| Item |
Criteria |
Inspection |
| Edge exclusion |
Round≤3㎜, Flat≤5㎜ |
Naked eye |
| Scratch(≤5㎜) |
C≤5 |
Naked eye |
| ≤500㎛ Particle & Miss pattern & Pattern fail |
C≤20 |
Microscope |
| Abnormal shape |
*TBD |
Microscope |
| Flat top |
Flat top shapped pattern not allowed |
SEM |
| Others |
Mixed faulity criterion is sum of defect number(C≤20).
-Only criteria product is shipped.
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| *: Depend on customer’s request. |
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| Item |
Criteria |
Inspection |
| Edge exclusion |
Round≤3㎜, Flat≤5㎜ |
Naked eye |
| Scratch(≤5㎜) |
C≤20 |
Naked eye |
| ≤500㎛ Particle & Miss pattern & Pattern fail |
C≤80 |
Microscope |
| Abnormal shape |
*TBD |
Microscope |
| Flat top |
Flat top shapped pattern not allowed |
SEM |
| Others |
Mixed faulity criterion is sum of defect number(C≤20).
-Only criteria product is shipped. |
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| *: Depend on customer’s request. |
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